PFA花篮独特性能优势:
1. 金属元素空白值低(铅、铀等元素含量<0.01ppb)
2. 耐强腐蚀:耐各种有机溶剂和强酸强碱
3. 无溶出和析出,纯净无污染
4. 耐高低温:-200至260℃
5. 耐绝缘、抗氧化、防静电
可雷雕、可装RFID 进行载具和材料追踪
品名 |
耐温范围 |
特性 |
应用实验 |
PFA花篮 |
-200至260℃ |
1.耐强酸、强碱和各种有机溶剂 2.金属元素空白值低 3.无溶出和析出 4.耐候性佳、不易应力变形 5.耐磨、抗静电性 6.有优良的化学稳定性 |
半导体蚀刻部门之酸碱制程中使用、传送晶圆。 |
PTFE 花篮
|
-200至250℃ |
花篮尺寸 |
长x宽x高 |
容量 |
槽间距 |
适 用 晶 圆 |
50mm(2英寸)(有豆) |
142.1(L)x67.8(W)x59.0(H)mm |
25PCS |
4.76mm |
2 inch (Ø50mm) 厚度0.5mm~0.7mm晶圆 |
50mm(2英寸)(无豆) |
142.1(L)x67.8(W)x59.0(H)mm |
25PCS |
4.76mm |
2 inch (Ø50mm) 厚度0.5mm~0.7mm晶圆 |
2.5英寸 |
142(L)x79(W)x73(H)mm |
25PCS |
4.76mm |
2.5 inch 晶圆 |
75mm(3英寸) |
142.49(L)x94.36(W)x82.53(H)mm |
25PCS |
4.76mm |
3 inch (Ø75mm) 晶圆 |
100mm(4英寸) |
142.24(L)x125.48(W)x114.3(H)mm |
25PCS |
4.76mm |
4 inch (Ø100mm) 厚度0.5mm~0.7mm晶圆 |
100mm(4英寸)(镂空版) |
142.24(L)x125.48(W)x114.3(H)mm |
25PCS |
4.76mm |
4 inch (Ø100mm) 厚度0.5mm~0.7mm晶圆 |
104mm(4.125英寸)(镂空版) |
142.24(L)x125.48(W)x114.3(H)mm |
25PCS |
4.76mm |
4.125″ inch(Ø104mm) 厚度0.5mm~0.7mm晶圆 |
125mm(5英寸) |
152.4(L)x142.88(W)x146.05(H)mm |
25PCS |
4.76mm |
5 inch (Ø125mm) 厚度0.5mm~0.7mm晶圆 |
150mm(6英寸) |
143.38(L)x177.8(W)x171.45(H)mm |
25PCS |
4.76mm |
6 inch (Ø150mm)晶圆 |
200mm(8英寸) |
203.2(L)x233.05(W)x218.44(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm) 晶圆 |
200mm(8英寸)(镂空版) |
203.2(L)x233.05(W)x218.44(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm) 晶圆 |
150mm(6英寸) |
178(L)x144(W)x115(H)mm |
25PCS |
4.76mm |
6 inch (Ø150mm)晶圆 |
200mm(8英寸) |
234.19(L)x220.5(W)x159(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm)晶圆 |
150mm(6英寸) |
177(L)x145(W)x173(H)mm |
12PCS |
9.525mm |
6 inch (Ø150mm) 晶圆 |
200mm(8英寸) |
203.05(L)x233.05(W)x218.44(H)mm |
13PCS |
12.7mm |
8 inch (Ø200mm) 晶圆 |
300mm(12英寸) |
350(L)x180(W)x320(H)mm |
13PCS |
10mm |
12 inch (Ø300mm) 晶圆 |
200mm(8英寸) |
200(L)x228(W)x250(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm) 晶圆 |
150mm(6寸) |
143.38(L)x177.8(W)x171.45(H)mm |
25PCS |
4.76mm |
6 inch (Ø150mm)晶圆 |
178(L)x144(W)x115(H)mm |
25PCS |
4.76mm |
6 inch (Ø150mm)晶圆 |
|
177(L)x145(W)x173(H)mm |
12PCS |
9.525mm |
6 inch (Ø150mm) 晶圆 |
|
200mm(8寸) |
203.2(L)x233.05(W)x218.44(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm) 晶圆 |
234.19(L)x220.5(W)x159(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm)晶圆 |
|
203.05(L)x233.05(W)x218.44(H)mm |
13PCS |
12.7mm |
8 inch (Ø200mm) 晶圆 |
|
200(L)x228(W)x250(H)mm |
25PCS |
6.35mm |
8 inch (Ø200mm) 晶圆 |
|
300mm(12寸) |
350(L)x180(W)x320(H)mm |
13PCS |
10mm |
12 inch (Ø300mm) 晶圆 |
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